| 摘要 |
PROBLEM TO BE SOLVED: To provide a photosensitive polymer compsn. having high resolution and excellent and stable film characteristics by preparing a polyimide precursor having high mol.wt., and to provide a producing method of the photosensitive polymer compsn. SOLUTION: This photosensitive polymer compsn. consists of (A) a polyimide precursor having 30000 to 70000 average mol.wt., (B) a photopolymn. initiator, (C) a sensitizer, (D) a polymn. inhibitor and (E) a solvent. The polyimide precursor (A) is obtd. by esterifying an aromatic tetracarboxylic acid anhydride and an alcohol having an ethylene-like unsatd. bond, adding an aromatic diamine to the ester, and polymerizing with diphenyl(2,3-dihydro-2-thioxo-3-benzoxazole) phosphonate or its deriv. or diphenyl(2,3-dihydro-2-thioxo-3-benzothiazole) phosphonate or its deriv. as a dehydration condensation agent. In the production of the compsn. above described, the dehydration condensation agent is removed from the obtd. polyimide precursor product and the polyimide precursor is precipitated. |
