| 摘要 |
PROBLEM TO BE SOLVED: To produce an electrode plate for plasma etching low in generation of fine particles and made of a glassy carbon by forming from the glassy carbon in which a surface roughness of a breaking surface structure has a structural property within a specified range. SOLUTION: In an electrode plate for plasma etching, the surface roughness Rms of a breaking surface is used as a measure indicating the fine structural structure of a glassy carbon and this value is set within the range of 5-30 nm. The range of 5-30 nm of the surface roughness Rms of the breaking surface is characterized in that an amorphous carbon crystal structure being a material characteristic of the glassy carbon has a structural property within a fixed range. When the value of the surface roughness of the breaking surface is lower than 5 nm. resistance to the plasma is lowered and a consumption speed at the time of etching is increased since a developing degree of the fine structural structure is low and an intercrystaline structure is small, on the other and, when the value exceeds 30 nm, a structural unit of the fine structure becomes large and the development of the particles accompanying the consumption is increased. |
