VACUUM COMPATIBLE WATER VAPOR AND RINSE PROCESS MODULE,申请号EP19970901426-传众专利搜索

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发明名称	VACUUM COMPATIBLE WATER VAPOR AND RINSE PROCESS MODULE
摘要
申请公布号	EP0875073(A1)	申请公布日期	1998.11.04
申请号	EP19970901426	申请日期	1997.01.15
申请人	FSI INTERNATIONAL	发明人	BAECKER, JAMES, I.;BECKER, SCOTT, D.;FOLINE, MICHAEL, J.;MACIEJ, TODD, K.
分类号	H01L21/677;H01L21/00;H01L21/02;H01L21/304;(IPC1-7):H01L21/00	主分类号	H01L21/677
代理机构		代理人
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