| 摘要 |
<p>PROBLEM TO BE SOLVED: To accomplish positioning precision with high accuracy and to improve the rigidity in a feeding direction by using a driving means in the direction of a bearing gap and a displacement detecting means and controlling a vibration mode of a moving body except the feeding direction of the moving body. SOLUTION: About a Y stage, vibrations in the direction of a Z axis on a Y stage, in a rotational direction Wx of an X axis turning and in a rotational direction Wy of a Y axis turning are controlled by controlling thrust that is generated by active bearings 17a to 17d based on displacement Z which is acquired by calculating position data Za to Zd in the direction of a Z axis that is detected by displacement detecting means 11a to 11d in a Z axis direction, a rotation angle Wx of an X axis turning and a rotation angle Wy of a Y axis turning. In addition, displacement detectors 19a and 19b which detect displacement Xc and Xd of a bearing gap in the direction of the X axis of the Y stage and an active bearing 18 which generates force in the direction of a bearing gap in the X axis direction are arranged, and a bearing gap Xz in the X axis direction on the Y stage is controlled based on the displacement of a bearing gap that is detected by the displacement detectors.</p> |
