| 摘要 |
PROBLEM TO BE SOLVED: To produce a thin oxide ceramic film free from oxygen deficiency and having a compsn. close to the theoretical stoichiometric ratio by forming an amorphous precursor film on a substrate, exposing it to an atmosphere of ozone and carrying out crystallization by firing. SOLUTION: A sol using lead acetate and an organometallic compd. such as titanium tetraisopropoxide as starting materials is prepd., applied on a substrate, dried by heating and dewaxed to form an amorphous precursor film of about O.2 μm. This film is crystallized by firing at a prescribed temp. after exposure to an atmosphere contg. ozone generated by corona discharge in the air or ozone treatment by irradiation with UV in an oxygen-contg. atmosphere. The sol is further applied, dried by heating and dewaxed to form an amorphous film and this film is fired after ozone treatment. These processes are repeated >=2 times to obtain the objective uniform flat crystalline oxide ceramic film having a compsn. close to the theoretical stoichiometric ratio. |
