POSITIONING MECHANISM FOR MATERIAL CASSETTE,申请号JP19970102872-传众专利搜索

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发明名称	POSITIONING MECHANISM FOR MATERIAL CASSETTE
摘要
申请公布号	JPH10294263(A)	申请公布日期	1998.11.04
申请号	JP19970102872	申请日期	1997.04.21
申请人	JEOL LTD	发明人	TAKAHASHI MAKOTO
分类号	G03F7/20;H01L21/027;(IPC1-7):H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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