发明名称 Sputtering of lithium
摘要 Lithium is sputtered from a target with a metallic lithium surface using an alternating sputtering potential with a frequency between about 8 and about 120 kHz, preferably about 10-100 kHz. The process can be used to apply lithium to electrochromic materials such as coatings on window glass.
申请公布号 US5830336(A) 申请公布日期 1998.11.03
申请号 US19950567781 申请日期 1995.12.05
申请人 MINNESOTA MINING AND MANUFACTURING COMPANY 发明人 SCHULZ, STEPHEN C.
分类号 G02F1/15;C23C14/18;C23C14/34;C23C14/35;(IPC1-7):C23C14/34 主分类号 G02F1/15
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