发明名称 Microbridge structure for emitting or detecting radiations and method for forming such microbridge structure
摘要 The microbridge structure is for emitting or detecting radiations. According to one embodiment, it comprises a substrate layer provided with two first electrical contacts, and a microstructure provided with two second electrical contacts and having an underside, a top side opposite to the underside, through which radiations are emitted or received, at least one radiation active layer lying between the underside and the top side, the radiation active layer having two distal points connected respectively to the two second electrical contacts of the microstructure, and a radiation reflective layer lying between the underside and the radiation active layer. It also comprises a micro support for suspending the microstructure over and at a predetermined distance from the substrate layer with the underside of the microstructure facing the substrate layer. The micro support is provided with at least two electrically conductive paths for connecting respectively the two first electrical contacts to two second electrical contacts. The present invention is also concerned with methods for forming microbridge structures.
申请公布号 US5831266(A) 申请公布日期 1998.11.03
申请号 US19960713147 申请日期 1996.09.12
申请人 INSTITUT NATIONAL D'OPTIQUE 发明人 JEROMINEK, HUBERT;RENAUD, MARTIN;SWART, NICHOLAS R.
分类号 G01J5/20;H01L31/0232;H01L31/0352;(IPC1-7):G01J5/20 主分类号 G01J5/20
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