Micro valve with preloaded valve flap

摘要

The microvalve (10) has a flow opening formed in a base structure (12), controlled by a mechanically tensioned valve flap (11), which is raised from the flow opening in its normal condition. The side of the valve flap facing the flow opening and the fixing point between the valve flap and the base structure have an insulating coating (17), for electrically insulating the valve flap from the base structure, so that an operating voltage can be applied between them.