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摘要
申请公布号
JP2818414(B2)
申请公布日期
1998.10.30
申请号
JP19880078615
申请日期
1988.03.30
申请人
发明人
分类号
H01L21/822;H01L27/04;H03K5/00;H04B1/74;H04L1/22;H04L25/02;(IPC1-7):H03K5/00
主分类号
H01L21/822
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