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发明名称
摘要
申请公布号	JP2818979(B2)	申请公布日期	1998.10.30
申请号	JP19910098701	申请日期	1991.04.30
申请人		发明人
分类号	H01L21/28;H01L21/3205;H01L21/768;H01L23/52;(IPC1-7):H01L21/28;H01L21/320	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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