| 摘要 |
Disclosed is a device (10) for proportioning a fluid flow from the inlet to the outlet, fitted with a membrane (12) having one or more openings (16) which act as a resistance to the medium outflow, and with a built-in pressure sensor (14) inside the membrane to capture any pressure difference between the inlet and the outlet of the proportioner (10), which is designed as a semiconductor chip, while the membrane (12) is a semiconductor membrane and the semiconductor chip areas exposed to the proportioned medium are covered with a passivation layer. |
