An apparatus and a process for depositing semi-conductor material from the gas phaseon to a heated core of semi-conductor material,申请号GB19630046298-传众专利搜索

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发明名称	An apparatus and a process for depositing semi-conductor material from the gas phaseon to a heated core of semi-conductor material
摘要
申请公布号	GB1040709(A)	申请公布日期	1966.09.01
申请号	GB19630046298	申请日期	1963.11.22
申请人	SIEMENS-SCHUCKERTWERKE AKTIENGESELLSCHAFT	发明人
分类号	C23C16/00;C30B13/20	主分类号	C23C16/00
代理机构		代理人
主权项
地址

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