摘要 |
<p>Air stream transfer apparatus capable of preventing particles in a transfer passage from adhering to an object to be processed and removing the particles. The apparatus is characterized in that a transfer face and a transfer passage partition both constituting a transfer passage are made of an electroconductive material and each have a thin insulating layer on the surface; a planer dust collecting electrode is opposed to an object to be processed; means is provided for bringing the dust collecting electrode and the face to be cleared of dust close to each other while jetting air; and means is provided for applying voltages between the transfer face and the dust collecting electrode and between the transfer passage partition and the dust collecting electrode. Another apparatus is characterized in that a transfer face and a transfer passage partition both constituting a transfer passage are made of an electroconductive material and each has a thin insulating layer on the surface; means for transferring a pre-charged semiconductive plate-shaped body a float along the transfer passage is provided; and the semiconductive plate-shaped body is used as a dust collecting electrode.</p> |