发明名称 |
FLASH EVAPORATOR |
摘要 |
A device and method for flash evaporating a reagent includes an evaporation chamber that houses a dome on which evaporation occurs. The dome is solid and of high thermal conductivity and mass, and may be heated to a temperature sufficient to vaporize a specific reagent. The reagent is supplied from an external source to the dome through a nozzle, and may be supplied as a continuous stream, as a shower, and as discrete drops. A carrier gas may be introduced into the evaporation chamber and create a vortex flow therewithin. After evaporation, the gas vapor may be removed from the evaporation chamber through a regulating valve to a reaction chamber. Another embodiment of the invention includes a plurality of evaporating domes that separately receive reagent, and may receive reagents of differing composition. |
申请公布号 |
WO9831844(A3) |
申请公布日期 |
1998.10.29 |
申请号 |
WO1997US24082 |
申请日期 |
1997.12.31 |
申请人 |
CERAM INCORPORATED;SHARP KABUSHIKI KAISHA |
发明人 |
DESU, SESHU, BABU;RAMANTHAN, SASANGAN;SUCHICITAL, CARLOS, TRES, AVALA |
分类号 |
B01D1/00;B01D3/06;C23C16/448 |
主分类号 |
B01D1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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