Device for gas excitation by means of a surface-wave plasma and gas treatment installation including such device

摘要

The gas excitation system is of the surfaguide(RTM) type and includes a hollow electrically conducting material structure (24) forming a wave guide. This structure is designed to be connected to a microwave generator and is fitted with a passage (38) designed to be traversed by a hollow dielectric tube (40) in which a gas to be excited circulates. The structure has also a wave concentration zone (30) designed to concentrate the microwave radiation produced by the generator towards the tube (40) during operation of the device. The system has in addition a sleeve (42,44) made from a reinforced electromagnetic material which is fixed to the structure (24) and which extends into the extension of the passage (38) so as to surround the hollow tube (40).