Cylindrical magnetron target structure and apparatus for affixing said target structure to a rotatable spindle
摘要
<p>An apparatus to releasably affix a rotating cylindrical magnetron target to a spindle utilizes a threaded spindle collar engaging threads on the outside surface of the target, with a single water-to-vacuum seal located at the target and spindle interface. The threads may be removable from the target, enabling efficient assembly/disassembly and recycling.</p>
申请公布号
EP0873431(A1)
申请公布日期
1998.10.28
申请号
EP19960940410
申请日期
1996.10.28
申请人
VANDERSTRAETEN E. BVBA;MORGAN, STEVEN;VANDERSTRAETEN, JOHAN;VANDERSTRAETEN, ERWIN;GOBIN, GUY
发明人
MORGAN, STEVEN;VANDERSTRAETEN, JOHAN;VANDERSTRAETEN, ERWIN;GOBIN, GUY