发明名称 RING INTERFEROMETER CONFIGURATION FOR WRITING GRATINGS
摘要 A method and apparatus is disclosed for creating a structure, such as a grating (45) in a photosensitive material (40). The method and apparatus relies upon creating at least two coherent beams of light (33, 38) and reflecting them, in a counter propagating manner, around a series of reflective elements (35, 37) along substantially equivalent paths so that the coherent beams interfere at a structure staging area (45). The structure staging area can then be utilised to create grating structures or the like having improved qualities.
申请公布号 EP0873529(A1) 申请公布日期 1998.10.28
申请号 EP19960939763 申请日期 1996.12.02
申请人 THE UNIVERSITY OF SYDNEY 发明人 OUELLETTE, FRANCOIS
分类号 G02B5/18;G02B6/136;H01S3/081 主分类号 G02B5/18
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