| 发明名称 |
Surface treatment of an oxide LnBa2Cu3O7-x single crystal |
| 摘要 |
When a cuprate oxide LnBa2Cu3O7-x (Ln=Y, Pr or Sm; 0.3</= x</=1.0) single crystal is heated for growing a film epitaxially on the crystal or for recovering the single crystal damaged on surfaces, lots of tall protrusions occur on the surface of the oxide single crystal substrate or the film. The smooth surface of the oxides becomes rugged by the protrusions. The oxide substrate or the oxide superconductor film is heated in an atmosphere including oxygen of a partial pressure between 50 mTorr and 200 mTorr. The oxygen gas prevents the protrusions from originating on the surface of the heated oxides. <MATH> |
| 申请公布号 |
EP0701009(B1) |
申请公布日期 |
1998.10.28 |
| 申请号 |
EP19950306030 |
申请日期 |
1995.08.30 |
| 申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LIMITED;KABUSHIKI KAISHA TOSHIBA;INTERNATIONAL SUPERCONDUCTIVITY TECHNOLOGY CENTER |
发明人 |
KONISHI, MASAYA;FUKE, HIROYUKI;ENOMOTO, YOUICHI;SHIOHARA, YUH;TANAKA, SHOJI |
| 分类号 |
C30B29/22;C01G1/00;C01G3/00;C30B33/00;H01L21/203 |
主分类号 |
C30B29/22 |
| 代理机构 |
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