发明名称 |
DEVICE FOR PRODUCING OXIDIC THIN FILMS |
摘要 |
The invention relates to an apparatus for the production of thin oxide coatings, having a vacuum chamber wherein an oxygen chamber with an opening and a rotary substrate holder overlapping the latter are disposed. For the rotary arrangement of the substrate holder a rotary mounting is provided, which engages a circumferential portion of the substrate holder. |
申请公布号 |
EP0873575(A1) |
申请公布日期 |
1998.10.28 |
申请号 |
EP19960945973 |
申请日期 |
1996.11.01 |
申请人 |
THEVA DUENNSCHICHTTECHNIK GMBH |
发明人 |
KINDER, HELMUT |
分类号 |
C23C14/24;C23C14/00;C23C14/08;C23C14/22;C23C14/50;C23C14/54;C30B25/02;C30B25/12;H01L21/687;H01L39/24 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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