| 摘要 |
PROBLEM TO BE SOLVED: To make any processing performable accurately and speedily at a time when each work position, for example, the position of a semiconductor package (a position of each ball), where regular sized members are plurally arranged in a fixed rule on the top of a work or an object of inspection is roughly specified in advance of the full-scale inspection. SOLUTION: A top face of a work 1 is imaged in a picture taken, and a first detection area 12 to be circumscribed with plural pieces of arrayal members 2 is fed out of this pickup picture image 10. Then, a second detection area 15 showing these members 2 in a line is fed out of this first detection area 12. In succession, well-known relative position data of these plural arrayal members 2 in relation to the work 1 and the first detection area 12 showing these arrayal members 2 fed out are butted to each other, whereby an absolute center position C of the work 1 is detected, while the well-known relative position data and the second detection area 15 showing a line of these members 2 fed out are butted to each other, whereby an attitude of the work 1 is detected as well. |
