CHARGED PARTICLE BEAM EXPOSING DEVICE,申请号JP19970095776-传众专利搜索

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发明名称	CHARGED PARTICLE BEAM EXPOSING DEVICE
摘要
申请公布号	JPH10289851(A)	申请公布日期	1998.10.27
申请号	JP19970095776	申请日期	1997.04.14
申请人	NIKON CORP	发明人	NAKASUJI MAMORU
分类号	G03F7/20;G02B27/32;H01L21/027;(IPC1-7):H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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