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摘要
申请公布号
JP2816630(B2)
申请公布日期
1998.10.27
申请号
JP19920213665
申请日期
1992.07.17
申请人
发明人
分类号
B05C11/08;G03F7/16;H01L21/027;H01L21/30;H01L21/31;H01L21/677;H01L21/68;(IPC1-7):H01L21/027
主分类号
B05C11/08
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代理人
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