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经营范围
发明名称
ELECTROSTATIC FAILURE VERIFYING TOOL
摘要
申请公布号
JPH10289260(A)
申请公布日期
1998.10.27
申请号
JP19970110328
申请日期
1997.04.11
申请人
NEC CORP
发明人
AKIMOTO TETSUYA
分类号
G01R31/26;G01R31/00;G01R31/12;G01R31/28;G06F17/50;H01L21/66;H01L21/82;(IPC1-7):G06F17/50
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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