| 摘要 |
PROBLEM TO BE SOLVED: To correctly measure a value of resistance, and to improve the working accuracy, by converting a value of resistance of a monitor element into the height of a thin film element, and stopping the lapping work by a lapping machine, in response to the reaching of the height of the thin film element to a target value. SOLUTION: When a value of resistance of a working monitor resisting element (ELG element) of a rover 101, becomes a specific value, the working is stopped. The stopping of the lapping work is performed by stopping a lapping machine. An unload cylinder 120 is operated when the value of resistance of the working monitor becomes the specific value, to project an unload block 121. Whereby an adaptor 11 is rotated around a support part 110a, to separate a work 103 from the lap surface plate 104. That is, the lap working is immediately stopped when the value of resistance of the working monitor becomes the specific value. Whereby the accuracy in size of the work can be improved. Further by installing the adaptor 11, the unloading can be easily performed. |
