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发明名称
FILM FORMATION DEVICE
摘要
申请公布号
JPH10289902(A)
申请公布日期
1998.10.27
申请号
JP19970110228
申请日期
1997.04.11
申请人
ULVAC JAPAN LTD
发明人
IIJIMA MASAYUKI;SATO MASATOSHI;UKISHIMA YOSHIYUKI;TAKAHASHI YOSHIKAZU
分类号
G03F7/038;G03F7/16;H01L21/203;H01L21/31;H01L21/312;(IPC1-7):H01L21/31
主分类号
G03F7/038
代理机构
代理人
主权项
地址
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