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发明名称
EXPOSURE
摘要
申请公布号
JPH10289853(A)
申请公布日期
1998.10.27
申请号
JP19970097227
申请日期
1997.04.15
申请人
CANON INC
发明人
SUZUKI YASUYUKI;ANDO KENJI;OTANI MINORU;HIROO RIYUUJI;KANAZAWA HIDEHIRO
分类号
G03F7/22;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/22
代理机构
代理人
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