METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE,申请号JP19970099387-传众专利搜索

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发明名称	METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH10289952(A)	申请公布日期	1998.10.27
申请号	JP19970099387	申请日期	1997.04.16
申请人	SONY CORP	发明人	KADOMURA SHINGO
分类号	H01L21/28;H01L21/302;H01L21/3065;H01L21/3213;H01L21/768;H01L23/522;(IPC1-7):H01L21/768;H01L21/306;H01L21/321	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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