FIELD ELECTRON EMISSION ELEMENT, MANUFACTURE THEREOF, AND FIELD ELECTRON EMISSION TYPE DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an field electron emission element which can control exactly the distance between the gate electrode and the electron emission part the cathode electrode with a simple structure. SOLUTION: A cathode electrode 2 and a gate electrode 4 are laminated through an insulation layer 3, and the opening 7 of the gate electrode 4, the through hole 8 of the insulation layer 3, and the hole 9 of the cathode electrode 2 are formed continuously by etching. Electrons are emitted from an edge part roughly at right angles to the hole 9 of the cathode electrode 2 exposed by the side etching of the insulation layer 3. A second gate electrode 16 is formed under the cathode electrode 2 through an insulation layer 17 as necessary, thereby improving electron emission efficiency.