发明名称 |
Semiconductor accelerometer including strain gauges forming a wheatstone bridge and diffusion resistors |
摘要 |
A semiconductor accelerometer having a sensor element which includes a support frame, a silicon mass, flexures connected to the support frame and the silicon mass, semiconductor strain gauges formed on the flexures, and a staggered arrangement of diffusion resistors for adjusting any offset value variation. Aluminum wiring is connected to the strain gauges to form a Wheatstone bridge circuit, and a housing is provided to cover the sensor element.
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申请公布号 |
US5827967(A) |
申请公布日期 |
1998.10.27 |
申请号 |
US19960651578 |
申请日期 |
1996.05.22 |
申请人 |
FUJI ELECTRIC CO., LTD.;FUJITSU TEN LIMITED |
发明人 |
UEYANAGI, KATSUMICHI;NISHIKAWA, MUTSUO |
分类号 |
G01P15/12;G01P21/00;G01R31/26;H01L29/84;(IPC1-7):G01P15/12 |
主分类号 |
G01P15/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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