Hydrogen separation membrane and process for producing the same

摘要

A hydrogen separation membrane having a good hydrogen selective permeance and a high stability, without any deterioration, even if exposed to a high temperature atmosphere or steam, which comprises a porous ceramic membrane with SiO2 deposited and filled into pores on the surface of the membrane and a SiO2 thin film formed on the surface of the membrane as a hydrogen selectively permeable film is produced by introducing a vaporized SiO2 source into pores on the surface of a porous ceramic membrane by suction established by providing a pressure difference between both sides of the membrane and thermally decomposing the SiO2 source, thereby forming, depositing and filling SiO2 into the pores and fully coating the outer surface of the membrane with a SiO2 thin film simultaneously where the SiO2 source is preferably a tetra(lower alkoxy)silane and the deposition of the SiO2 source is preferably carried out by a chemical vapor deposition process.