| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure a resistance value as for the manufacture of the magnetic head which machines the magnetic head while measuring the resistance value of a machined monitor element. SOLUTION: The monitor element 102a which has analog variation in resistance value Ra as it is machined and a magnetic head element 102 are formed on a wafer 100, which is cut. Then while the resistance value of the monitor element 102a is measured, machining is carried out. After the machining, the magnetic head 102 is taken out. The difference ΔI between the positions of the monitor element 102a and magnetic head element 102 is measured and used to convert the resistance value of the monitor element 102a into the height of the magnetic head element 102. Consequently, an error of a mask, etc., can be corrected. Further, a pattern is accurately formed by setting the monitor element 102a and magneto-resistance film 83 of the magnetic head 102 to the same position. |
