| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe microscope with high resolving power which reduces the low-frequency components of noise from output results by incorporating a vibration-isolating platform which reduces disturbance components from floor vibrations even placed at a location of device placement with low-frequency components. SOLUTION: A probe microscope as this device is mounted on a socalled active vibration-isolating platform. This vibration-isolating platform detects vibrations given to a vibration-isolating platform surface plate 14 due to floor vibrations through the use of a displacement meter 15, accelerometer 16, etc., and provides the vibration-isolating platform surface plate 14 with vibrations with phases opposite to that of the detected vibrations. By this, vibrations from the floor is reduced on the vibration-isolating platform surface plate 14. External vibration components from floor vibrations are reduced even at a location of device placement with low-frequency components to high-frequency components. |
