| 摘要 |
PROBLEM TO BE SOLVED: To enable realtime X-ray dynamic image fluoroscopy with short reset time by raising the numerical aperture of each X-ray detecting pixel, and enhancing the sensitivity in detection by X-ray. SOLUTION: In a direct conversion system of X-ray image-pick device 109, when the voltage of pixels is increased to a specified voltage by the charge converted into a charge from X-ray and accumulated in pixels, the charge is discharged out of the pixels. Then, a film diode (TFT), for example, MIM (metal-insulator-metal) structure, MSI(metal-semi-insulator) structure, BTB(back- to-back, reverse series) structure, or the like being a two-terminal element which shows a nonlinear resistance property and is made by a film is used. Hereby, a protective diode can be made with an in-pixel space factor smaller than the protective diode by TFT, so that the numerical aperture and CST can be secured more than at the time of TFT, and an X-ray image-pick device 109 high in detection sensitivity and S/N ratio can be made.
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