发明名称 ELECTRONIC PART WIRE BONDING CAPILLARY STRUCTURE
摘要 PROBLEM TO BE SOLVED: To secure a fusion state of a gold wire to an aluminum plate by a method wherein a conical angle in an inner chamber at a center of a bottom face of a capillary is made as a specific angle and an inclined angle of a bottom face of the circumference is made as a specific angle. SOLUTION: A conical space widened downward, namely an inner chamber 11 is formed at a lower end of an insertion path 10 of a capillary M, and an inclined pressing face 12 of an inclination state is formed ranging from a main at a lower end of the inner chamber 11 to an outer margin of a bottom face of the capillary M. Further, a boundary between the inner chamber M and the pressing face 12 is made as a cut-out part 13 comprising an annular angular part. Further, a conical angle α of the inner chamber M is made at about 130 degrees and an inclined angle β of a pressing face 12 is about 4 degrees. Accordingly, when secondary bonding is performed, namely an intermediate portion of a gold wire is pressed to an inner lead face, an end part of a gold wire in which the pressing face 12 is cut out is crushed to a flat state, and an oxide film on an aluminum surface is excluded while crushed, so that compression joint of an aluminum raw material is facilitate.
申请公布号 JPH10284531(A) 申请公布日期 1998.10.23
申请号 JP19970088525 申请日期 1997.04.07
申请人 ROHM CO LTD 发明人 KOJIMA KAZUHISA
分类号 H01L21/60 主分类号 H01L21/60
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