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发明名称
VACUUM VALVE
摘要
申请公布号
JPH10281341(A)
申请公布日期
1998.10.23
申请号
JP19970102789
申请日期
1997.04.04
申请人
ULVAC JAPAN LTD;TOSHIBA CORP;IWATE TOSHIBA ELECTRON KK
发明人
KUDO MASAJI;USHIYAMA TARO;SUGIYAMA HARUO
分类号
F16K51/02;(IPC1-7):F16K51/02
主分类号
F16K51/02
代理机构
代理人
主权项
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