| 摘要 |
<p>PROBLEM TO BE SOLVED: To simplify the installation of a sensor when a metal film sensor and a coupler for coupling an optical beam are separately formed, and stabilize the positional relation between the sensor and the coupler. SOLUTION: In this sensor, a coupler means 10 has a sensor attachment 15 for supporting a sensor unit 1 having a metal film 3 formed thereon, and the sensor unit 1 is supported by the attachment 15 so that the positional relation of the sensor unit 1 to the coupler means 10 is regularly constant, and a refractive index matching oil 5 is filled between the sensor unit 1 and the coupler means 10.</p> |
