GLASS SUBSTRATE HEATING DEVICE AND METHOD FOR SEPARATING GLASS SUBSTRATE FROM DEVICE

摘要

PROBLEM TO BE SOLVED: To heat a thin glass substrate efficiently without separating charging. SOLUTION: A needle-like electrode 19 is arranged at the adsorption slit 6 or the gas discharge portion 18 of a glass substrate, and ionized dry air or dry nitrogen is supplied. Thereby, the charging of the glass substrate resulting from separation charging is quickly removed, the separation charging is suppressed, and even a thin glass substrate is closely stuck on a heating plate and can be heat-treated keeping high heating performance.