| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer conveyer, with which a wafer is hardly warped when setting the wafer on a preheated suscepter at a CVD device. SOLUTION: A conveyer 3 is composed of a setter 4, chuck 5 and reflection panel 6 or the like. The chuck 5 is provided with plural pawls at its lower edge part and supports a wafer 1 from the downside of its edge with these pawls. The setter 4 vertically and horizontally drives the chuck 5 and loads or unloads the wafer 1 onto a suscepter 2. The reflection panel 6 is attached on the lower face side of setter 4 and arranged so as to cover the wafer 1 set on the suscepter 2 from the upside. The suscepter 2 is heated to the prescribed temperature by a heater block 9 arranged on the lower surface side. The wafer 1 carried onto the suscepter 2 and set by the conveyer 3 is heated from the lower surface side and simultaneously heated from the upper surface side as well by reflecting the radiation heat from the suscepter 2 on the reflection panel 6. |
