发明名称 COMPOUND SEMICONDUCTOR SOLAR CELL, AND MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To stably produce a solar cell high in conversion efficiency by performing heat treatment after the formation of cadmium sulfide film on a substrate, thereby reforming the crystal property of the film. SOLUTION: A cadmium sulfide film 3 is made on, for example, an ITO film 2 which is a transparent conductive film made on a glass substrate 1. A cadmium telluride film 4 a p-type semiconductor is made on this cadmium sulfide. Next, a carbon film 5 is made on the cadmium telluride film 4, and after this, for example, AgIn electrodes 6 are made on the cadmium sulfide film 3 and the carbon film layer 5, so as to manufacture a solar cell. In this manufacture, heat treatment is performed after the formation of the cadmium sulfide film on the substrate. Hereby, the impurities in the cadmium sulfide film and at the surface can be removed, and the interior of the crystal of the film is made superior, and a close packed cadmium sulfide film good in permeability can be obtained. Manufacturing a solar cell by the use of this will enable a superior solar cell of high conversion efficiency to be produced stably.
申请公布号 JPH10284744(A) 申请公布日期 1998.10.23
申请号 JP19970090638 申请日期 1997.04.09
申请人 MATSUSHITA DENCHI KOGYO KK 发明人 TSUJI MIWA;SHIBUYA SATOSHI;NISHIO TAKESHI;HIBINO TAKESHI;MUROZONO MIKIO
分类号 H01L31/04;H01L21/477 主分类号 H01L31/04
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