发明名称 LASER WRITING SYSTEM
摘要 PROBLEM TO BE SOLVED: To make is possible to easily and rapidly execute a post-processing stage and inspecting stage of the object to be written after writing pattern recording by storing and holding the variable identification information vector data and scaling correction information data dealing with variable identification information raster data. SOLUTION: The variable identification information vector data and scaling correction information data dealing with variable identification information raster data are stored and held. A non-volatile memory 108 is connected to, for example, a system control circuit 80. The lot number data and expansion and contraction rate data among the variable identification information of individual object to be written are written in association with each other in the non-volatile memory 108 at the time of the writing action. The data of individual object to be written of the non-volatile memory 108 are transmitted at need to an engineering work station(EWS) 86 and are utilized for the post- processing and inspecting to be afterward executed on the individual object to be written after the writing.
申请公布号 JPH10282684(A) 申请公布日期 1998.10.23
申请号 JP19970103872 申请日期 1997.04.07
申请人 ASAHI OPTICAL CO LTD 发明人 OE YUJI
分类号 G03F7/20;B23K26/00;B23K26/08;H01L21/027 主分类号 G03F7/20
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