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发明名称
INTERCONNECTION STRUCTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT AND MANUFACTURE THEREOF
摘要
申请公布号
JPH10284495(A)
申请公布日期
1998.10.23
申请号
JP19980131615
申请日期
1998.05.14
申请人
NEC CORP
发明人
HAYASHI YOSHIHIRO
分类号
H01L21/28;H01L21/3205;H01L21/768;(IPC1-7):H01L21/320
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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