| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an inexpensive and accurate current sensor by aligning an electrode wire and a Hall effect element on the same substrate precisely. SOLUTION: Patterns of a current flow-in terminal 11 and a current flow-out terminal 12 of a wire 1 for allowing a current to be measured to flow, a wire 13 for connecting these, and a terminal for Hall effect elements are formed collectively. When the wiring pattern is formed, a precise pattern alignment is made in reference to, for example, alignment marks 14 and 15 that are formed simultaneously when a Hall effect element 3 is formed. In this pattern alignment, an accurate alignment of approximately±0.1μm is achieved. In this manner, an alignment can be made accurately, a current can be measured precisely and stably. Also, since all can be created by the integrated circuit manufacturing technique, a large number of current sensor chips can be accurately manufactured by a single manufacturing process as in a normal IC, thus creating a highly accurate, highly functional, and inexpensive current sensor.</p> |
