摘要 |
PROBLEM TO BE SOLVED: To improve controlling accuracy of gas flow in an inexpensive method, by forming closing member which controls valve opening using solenoid and a diaphragm tightened to a valve casing, and arranging medium flow path between an inlet and a surface of movable closing member in the opposite side of a valve seat. SOLUTION: A valve 1 includes a solenoid 3 which is placed in a valve casing 2 which comprises an inlet 6, an outlet 7, and a valve opening 8 arranged between them, and a first end 10 of a shaft 5 which extends through the solenoid casing 4 is placed close to a diaphragm 9 which is just in front of the valve opening 8. The diaphragm 9 is moved by the solenoid shaft 5, and therefore, for example, controls medium flow to a patient relevant to an intake device. A medium flow path 12 which is filled with gas from the inlet 6 is placed between the inlet 6 and a second end 11 of the solenoid shaft 5, and the diaphragm 9 is pressure contacted onto a valve seat 13 by gas pressure in the flow path 12. |