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发明名称
LASER MICROSCOPE AND PATTERN INSPECTING INSTRUMENT USING THE SAME
摘要
申请公布号
JPH10282010(A)
申请公布日期
1998.10.23
申请号
JP19970088116
申请日期
1997.04.07
申请人
LASER TEC KK
发明人
KUSUSE HARUHIKO
分类号
G01B11/30;G01N21/88;G01N21/956;G02B21/00;H01L21/66;(IPC1-7):G01N21/88
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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