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发明名称
WAFER MECHANICAL SCANNING METHOD AND ION IMPLANTATION DEVICE
摘要
申请公布号
JPH10283973(A)
申请公布日期
1998.10.23
申请号
JP19970084777
申请日期
1997.04.03
申请人
SONY CORP
发明人
KAWASHIMA MASAHITO
分类号
H01J37/317;H01L21/265;(IPC1-7):H01J37/317
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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