Semiconductor pressure sensor

摘要

The sensor has a substrate (20). A semiconductor pressure detection element, which has a pressure detector (100) with two terminals (T9,T10), is arranged on the substrate. A small potential difference proportional to a pressure at the sensor is generated between the two terminals. The sensor also has a peripheral circuit (7) to carry out a differential amplification of the small potential difference based on a reference voltage applied to it. The sensor also has a reference voltage setting resistor unit (R1,R2,R13,R14)to set the reference voltage to a predetermined value. A temperature compensation resistor device compensates for an error in the pressure detector due to a temperature change and may also compensate for an error in the peripheral circuit caused by a change in the reference voltage resulting from the temperature change.