Träger für scheibenförmige Gegenstände,申请号DE19945006900-传众专利搜索

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发明名称	Träger für scheibenförmige Gegenstände
摘要
申请公布号	DE59406900(D1)	申请公布日期	1998.10.22
申请号	DE19945006900	申请日期	1994.01.03
申请人	SEZ SEMICONDUCTOR-EQUIPMENT ZUBEHOER FUER DIE HALBLEITERFERTIGUNG AG, VILLACH, AT	发明人	SUMNITSCH, FRANZ, A-9020 KLAGENFURT, KAERNTEN, AT
分类号	C23F1/08;H01L21/00;H01L21/306;H01L21/683;(IPC1-7):H01L21/00	主分类号	C23F1/08
代理机构		代理人
主权项
地址

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