发明名称 Method to improve adhesion of a thin submicron fluoropolymer film on an electronic device
摘要 The present invention comprises a substrate having at least one of metal, alloy, or semiconductor features with an insulative fluoropolymer dielectric layer bonded thereto through the use of silane coatings, and a method of manufacture.
申请公布号 AU6249898(A) 申请公布日期 1998.10.22
申请号 AU19980062498 申请日期 1998.01.27
申请人 W.L. GORE + ASSOCIATES INC. 发明人 C. THOMAS ROSENMAYER
分类号 B05D5/08;H01L21/312;H01L21/768;H01L23/532 主分类号 B05D5/08
代理机构 代理人
主权项
地址