Angular velocity sensor

摘要

The angular velocity sensor has a supporting substrate (34), to which a semiconductor substrate (37) is attached. The semiconductor substrate has a fixed section (22) and an elastic support part (25), which supports a mass (32). The substrate also has a concave section which defines a circumferential section of the mass. A drive device (28) causes the mass to vibrate in a drive direction. The substrate also has a detector device (30), which detects a displacement of the mass in a direction perpendicular to the drive direction parallel to the plane of the mass. The detector device includes a first electrode (31), which extends from the fixed section (41) in the drive direction, and a second electrode, which extends from the circumferential section of the mass in the drive direction.